JPH0319482B2 - - Google Patents

Info

Publication number
JPH0319482B2
JPH0319482B2 JP57189952A JP18995282A JPH0319482B2 JP H0319482 B2 JPH0319482 B2 JP H0319482B2 JP 57189952 A JP57189952 A JP 57189952A JP 18995282 A JP18995282 A JP 18995282A JP H0319482 B2 JPH0319482 B2 JP H0319482B2
Authority
JP
Japan
Prior art keywords
test object
components
interferometer
reflected
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57189952A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5885103A (ja
Inventor
Jon Daunzu Maikeru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT RES DEV
Original Assignee
NAT RES DEV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAT RES DEV filed Critical NAT RES DEV
Publication of JPS5885103A publication Critical patent/JPS5885103A/ja
Publication of JPH0319482B2 publication Critical patent/JPH0319482B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP57189952A 1981-10-30 1982-10-28 表面プロフイル干渉計 Granted JPS5885103A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8132745 1981-10-30
GB8132745 1981-10-30

Publications (2)

Publication Number Publication Date
JPS5885103A JPS5885103A (ja) 1983-05-21
JPH0319482B2 true JPH0319482B2 (en]) 1991-03-15

Family

ID=10525503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57189952A Granted JPS5885103A (ja) 1981-10-30 1982-10-28 表面プロフイル干渉計

Country Status (3)

Country Link
US (1) US4534649A (en])
JP (1) JPS5885103A (en])
DE (1) DE3240234C2 (en])

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4848908A (en) * 1983-10-24 1989-07-18 Lockheed Missiles & Space Company, Inc. Optical heterodyne roughness measurement system
US5133601A (en) * 1991-06-12 1992-07-28 Wyko Corporation Rough surface profiler and method
DE4138562C2 (de) * 1991-11-25 1995-11-23 Fraunhofer Ges Forschung Mikroprofilometermeßkopf
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
DE19626261A1 (de) * 1995-06-30 1997-01-02 Nikon Corp Beobachtungsvorrichtung
JP3534363B2 (ja) * 1995-07-31 2004-06-07 パイオニア株式会社 結晶レンズ及びこれを用いた光ピックアップ光学系
US5784163A (en) * 1996-09-23 1998-07-21 International Business Machines Corporation Optical differential profile measurement apparatus and process
US5926266A (en) * 1996-09-23 1999-07-20 International Business Machines Corporation Optical apparatus for rapid defect analysis
US5703684A (en) * 1996-09-23 1997-12-30 International Business Machines Corporation Apparatus for optical differential measurement of glide height above a magnetic disk
JP3559452B2 (ja) * 1998-06-23 2004-09-02 ペンタックス株式会社 自動焦点検出測量機の遮光構造
US6181430B1 (en) 1999-03-15 2001-01-30 Ohio Aerospace Institute Optical device for measuring a surface characteristic of an object by multi-color interferometry
AU1377601A (en) * 1999-11-24 2001-06-04 Haag-Streit Ag Method and device for measuring the optical properties of at least two regions located at a distance from one another in a transparent and/or diffuse object
US6580509B1 (en) * 2000-04-24 2003-06-17 Optical Physics Company High speed high resolution hyperspectral sensor
US6683710B2 (en) * 2001-06-01 2004-01-27 Optical Research Associates Correction of birefringence in cubic crystalline optical systems
US6970232B2 (en) * 2001-10-30 2005-11-29 Asml Netherlands B.V. Structures and methods for reducing aberration in integrated circuit fabrication systems
US7453641B2 (en) * 2001-10-30 2008-11-18 Asml Netherlands B.V. Structures and methods for reducing aberration in optical systems
US6844972B2 (en) 2001-10-30 2005-01-18 Mcguire, Jr. James P. Reducing aberration in optical systems comprising cubic crystalline optical elements
US6995908B2 (en) * 2001-10-30 2006-02-07 Asml Netherlands B.V. Methods for reducing aberration in optical systems
WO2003038479A2 (en) * 2001-10-30 2003-05-08 Optical Research Associates Structures and methods for reducing aberration in optical systems
US7072102B2 (en) 2002-08-22 2006-07-04 Asml Netherlands B.V. Methods for reducing polarization aberration in optical systems
US20090066970A1 (en) * 2007-05-21 2009-03-12 Muetec Automatisierte Mikroskopie Und Messtechnik Gmbh Arrangement and method for improving the measurement accuracy in the nm range for optical systems
GB0713982D0 (en) * 2007-07-18 2007-08-29 Univ Birmingham Improved interferometer
DE102013005187A1 (de) 2013-03-20 2014-09-25 Carl Zeiss Microscopy Gmbh Verfahren zur Ermittlung von Rauheit- und/oder Topographiedaten von Oberflächen in der Materialmikroskopie
US9784570B2 (en) 2015-06-15 2017-10-10 Ultratech, Inc. Polarization-based coherent gradient sensing systems and methods
TWI575221B (zh) * 2015-11-20 2017-03-21 財團法人工業技術研究院 表面粗度檢測系統及其方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
JPS567006A (en) * 1979-06-22 1981-01-24 Ibm Method of extending measurement range of interference
JPS6017041A (ja) * 1983-07-08 1985-01-28 Sumitomo Electric Ind Ltd ワイアカツト放電加工用電極線

Also Published As

Publication number Publication date
DE3240234A1 (de) 1983-05-11
DE3240234C2 (de) 1995-01-05
JPS5885103A (ja) 1983-05-21
US4534649A (en) 1985-08-13

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